Items where Author is "Smirnov, A. L."

Demin, V. N. and Borisov, V. O. and Grachev, G. N. and Smirnov, A. L. and Khomyakov, M. N. and Bagayev, S. N. (2021) Laser-Plasma Deposition of Silicon Carbonitride Films by the HMDS Vapor Gas Flow Activation after a Laser Beam Focus. Advances in Materials Physics and Chemistry, 11 (07). pp. 121-130. ISSN 2162-531X