Items where Author is "Bunday, Benjamin"
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Attota, Ravi Kiran and Kang, Hyeonggon and Scott, Keana and Allen, Richard and Vladar, Andras E and Bunday, Benjamin (2018) Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy. Measurement Science and Technology, 29 (12). p. 125007. ISSN 0957-0233